Hasan, Dr. RezaulElamana Marakkadath, Dalin2024-11-012024-11-012024-10-29https://mro.massey.ac.nz/handle/10179/71891Conventional pressure monitoring sensors used in biomedical applications, such as blood pressure and left ventricular systolic pressure measurements, have significant drawbacks, including high power consumption that shortens battery life and contributes to increased costs. A multifunctional piezoelectric transducer has been implemented for self-powered pressure sensing and energy harvesting (EH), eliminating the need for a separate transducer for pressure sensing and energy harvesting. This approach optimizes resources and reduces costs. The piezoelectric EH/sensor uses a lead-free, biocompatible, high-performance aluminum nitride (AlN) transducer. This article presents comprehensive physics-based mathematical modelling and numerical simulations that deliver optimized design parameters for a novel piezoelectric thin-film MEMS transducer energy-converter for improved pressure sensitivity and power density. The experimental results show a sensitivity of 0.06 V/kPa and a power density of 1.1 mW/cm³.--Shortened abstract© The AuthorMicroelectromechanical systemsBiosensorsPressure transducers, BiomedicalThin-film circuitsPiezoMEMSCMOSenergy harvesteraluminum nitrideSynchronous Electric Charge Extraction (SECE)400908 Microelectronics