Piezoelectric micro-energy harvester integrated with CMOS energy extraction circuits : a thesis presented in partial fulfilment of the requirements for the degree of Doctor of Philosophy in Engineering at Massey University, Auckland, New Zealand. EMBARGOED until 5 November 2027.
| dc.confidential | Embargo : Yes | |
| dc.contributor.advisor | Hasan, Dr. Rezaul | |
| dc.contributor.author | Elamana Marakkadath, Dalin | |
| dc.date.accessioned | 2024-11-01T03:43:17Z | |
| dc.date.available | 2024-11-01T03:43:17Z | |
| dc.date.issued | 2024-10-29 | |
| dc.description.abstract | Conventional pressure monitoring sensors used in biomedical applications, such as blood pressure and left ventricular systolic pressure measurements, have significant drawbacks, including high power consumption that shortens battery life and contributes to increased costs. A multifunctional piezoelectric transducer has been implemented for self-powered pressure sensing and energy harvesting (EH), eliminating the need for a separate transducer for pressure sensing and energy harvesting. This approach optimizes resources and reduces costs. The piezoelectric EH/sensor uses a lead-free, biocompatible, high-performance aluminum nitride (AlN) transducer. This article presents comprehensive physics-based mathematical modelling and numerical simulations that deliver optimized design parameters for a novel piezoelectric thin-film MEMS transducer energy-converter for improved pressure sensitivity and power density. The experimental results show a sensitivity of 0.06 V/kPa and a power density of 1.1 mW/cm³.--Shortened abstract | |
| dc.identifier.uri | https://mro.massey.ac.nz/handle/10179/71891 | |
| dc.publisher | Massey University | |
| dc.publisher | Embargoed until 5 November 2027 | |
| dc.rights | © The Author | |
| dc.subject | Microelectromechanical systems | |
| dc.subject | Biosensors | |
| dc.subject | Pressure transducers, Biomedical | |
| dc.subject | Thin-film circuits | |
| dc.subject | PiezoMEMS | |
| dc.subject | CMOS | |
| dc.subject | energy harvester | |
| dc.subject | aluminum nitride | |
| dc.subject | Synchronous Electric Charge Extraction (SECE) | |
| dc.subject.anzsrc | 400908 Microelectronics | |
| dc.title | Piezoelectric micro-energy harvester integrated with CMOS energy extraction circuits : a thesis presented in partial fulfilment of the requirements for the degree of Doctor of Philosophy in Engineering at Massey University, Auckland, New Zealand. EMBARGOED until 5 November 2027. | |
| thesis.degree.discipline | Engineering | |
| thesis.degree.name | PhD | |
| thesis.description.doctoral-citation-abridged | Traditional pressure monitoring sensors used in biomedical applications, such as those for measuring blood pressure and left ventricular systolic pressure, face significant limitations due to their high power consumption. This inefficiency not only reduces battery life but also increases overall costs. To tackle these challenges, this research advances the field of biomedical microelectronics by developing an innovative piezoelectric microsensor array device capable of simultaneously performing pressure sensing and energy harvesting. This work integrates a CMOS-based energy extraction circuit with a piezoelectric sensor array, allowing for efficient energy management alongside precise sensing within a compact, monolithic structure. The project introduces comprehensive numerical and physics-based modelling for the novel piezoelectric sensor/energy harvester array. Additionally, it proposes a new approach to a self-powered CMOS-based synchronous electric charge extraction circuit specifically designed for piezoelectric energy harvesters and sensors. This strategy involves utilizing pre-charged and back-gate-driven MOSFET-based peak detectors and switching circuits. Ultimately, the sensor array was designed and monolithically integrated with CMOS circuits. | |
| thesis.description.doctoral-citation-long | My research advanced the field of biomedical microelectronics by developing an innovative piezoelectric microsensor array device that simultaneously performs pressure sensing and energy harvesting. This work combines a CMOS-based energy extraction circuit with a piezoelectric sensor array, allowing for efficient energy management alongside precision sensing within a compact, monolithic structure. The findings from this work were published in two IEEE Transactions, and two additional papers are currently under review, positioning their work at the cutting edge of wearable and implantable medical technology. | |
| thesis.description.name-pronounciation | Da lin Ela mana Mara kkadath |